4 a plasma Technology and Power Supplies for thin film applications DC dc-pulse pulsed dc power supply magnetron dual single planar rotatable sputter sputtering thin thilm deposition source hipims technology deposition unipolar bipolar coating arc pulsed arc frequency impuls dünnfilm prozess pvd pecvd production mf stromversorgung abeg engineering

4a plasma Technologie DC dc-pulse pulsed dc power supply magnetron dual single planar rotatable sputter sputtering thin thilm deposition source hipims technology deposition unipolar bipolar coating arc pulsed arc frequency impuls dünnfilm prozess pvd pecvd production mf stromversorgung abeg engineering

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